ETCH

Product name:
High Precision Parts made from Alumina, AlN, SiC, Quartz, Sapphire and Silicon used in Etch Chambers.

Product description:
Xycarb Ceramics delivers a complete range of consumable parts for ETCH systems which are produced by well-controlled production processes and high precision machining in order to guarantee highest quality levels. We deliver specific parts for LAM and other systems. Our products drive extension of lifetime and reduction of cost of ownership.

Product detail:
Complete package of consumables like Upper electrode, Attachment Ring, Plate wafer clamp, Rings.