Lamps

Product name:
Infrared lamps for EPI and RTP applications

Product description:
Xycarb Ceramics Lamps product line includes infrared lamps for EPI and RTP

Product detail:
2kW lamp for AMAT Centura EPI
6kW lamp for ASM Epsilon EPI
500W lamp for AMAT Centura XE+ RTP
520W lamp for AMAT Radiance RTP
1kW, 6kW lamps for other applications